Dark-field line confocal imaging with point confocality and extended line field for bulk defects detection

Jingtao Dong; Tengda Zhang; Lei Yang; Yuzhong Zhang; Rongsheng Lu; Xinglong Xie

doi:10.3788/COL202321.041203

Chinese Optics Letters, Volume. 21, Issue 4, 041203(2023)

Dark-field line confocal imaging with point confocality and extended line field for bulk defects detection Editors' Pick

Jingtao Dong^1、*, Tengda Zhang¹, Lei Yang¹, Yuzhong Zhang¹, Rongsheng Lu^1、**, and Xinglong Xie^2、***

Author Affiliations

¹Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology, Hefei 230009, China

²Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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Jingtao Dong, Tengda Zhang, Lei Yang, Yuzhong Zhang, Rongsheng Lu, Xinglong Xie. Dark-field line confocal imaging with point confocality and extended line field for bulk defects detection[J]. Chinese Optics Letters, 2023, 21(4): 041203

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Paper Information

Category: Instrumentation, Measurement, and Optical Sensing

Received: Oct. 19, 2022

Accepted: Dec. 6, 2022

Posted: Dec. 6, 2022

Published Online: Mar. 15, 2023

The Author Email: Jingtao Dong (jtdong@hfut.edu.cn), Rongsheng Lu (rslu@hfut.edu.cn), Xinglong Xie (xiexl329@mail.shcnc.ac.cn)

DOI:10.3788/COL202321.041203

Topics

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Instrumentation, Measurement and Metrology