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Optoelectronics Letters, Volume. 8, Issue 5, 356(2012)

How to reduce the Al-texture in AlN films during film preparation

Ju-qian YIN*... Xi-ming CHEN, Bao-he YANG, Qian ZHANG and Xiao-guo WU |Show fewer author(s)
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  • Tianjin Key Laboratory of Film Electronic and Communication Device, School of Electronics Information Engineering, Tianjin University of Technology, Tianjin 300384, China
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    YIN Ju-qian, CHEN Xi-ming, YANG Bao-he, ZHANG Qian, WU Xiao-guo. How to reduce the Al-texture in AlN films during film preparation[J]. Optoelectronics Letters, 2012, 8(5): 356

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    Paper Information

    Received: May. 16, 2012

    Accepted: --

    Published Online: Jul. 12, 2017

    The Author Email: Ju-qian YIN (1234yinjuqian@163.com)

    DOI:10.1007/s11801-012-2274-x

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology