Photonics Research, Volume. 9, Issue 4, 605(2021)

80 GHz germanium waveguide photodiode enabled by parasitic parameter engineering

Yang Shi1、†, De Zhou1、†, Yu Yu*, and Xinliang Zhang
Author Affiliations
  • Wuhan National Laboratory for Optoelectronics & School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
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    Figures & Tables(8)
    Cross-section view and equivalent circuit for a conventional PD.
    (a) Simulated bandwidth varying with Rs and Lp. (b) Calculated Rs varying with p-type doping concentration.
    (a) 3D schematic of the PD-A. (b) Cross-section of the PD-A with full silicon P++ doping. (c) Microscopic image for the PD-A/B with inductor. (d) Microscopic image for the PD-REF without inductor.
    I-V characteristics of PDs at dark and with light incidence.
    Measured and fitted bandwidth characteristics of Ge PDs.
    • Table 1. Silicon Doping and Electrode Inductors of Three Kinds of PDs

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      Table 1. Silicon Doping and Electrode Inductors of Three Kinds of PDs

      TypeSilicon DopingSimulated Inductor
      PD-AP++With 240 pH
      PD-BP+With 300 pH
      PD-REFP+Without
    • Table 2. Responsivities and Dark Currents of Three Kinds of PDs

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      Table 2. Responsivities and Dark Currents of Three Kinds of PDs

      TypeResponsivity (A/W)Dark Current (nA)
      PD-A0.896.4
      PD-B1.006.0
      PD-REF1.004.5
    • Table 3. Comparison of the High-Speed Waveguide-Coupled Ge PDs

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      Table 3. Comparison of the High-Speed Waveguide-Coupled Ge PDs

      Refs.TypeDark Current (nA)Responsivity (A/W)Bandwidth (GHz)Detectivity (cmHz1/2W1)
      [4]Vertical190.6502.56 × 109
      [5]Vertical30000.75606.85 × 108
      [6]Vertical610.85674.30 × 109
      [7]Lateral40000.81208.94 × 108
      [8]Lateral2.50.72676.78 × 109
      [9]Lateral400.5503.13 × 109
      This workVertical6.40.89801.33 × 1010
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    Yang Shi, De Zhou, Yu Yu, Xinliang Zhang. 80 GHz germanium waveguide photodiode enabled by parasitic parameter engineering[J]. Photonics Research, 2021, 9(4): 605

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    Paper Information

    Category: Integrated Optics

    Received: Dec. 8, 2020

    Accepted: Feb. 7, 2021

    Published Online: Apr. 6, 2021

    The Author Email: Yu Yu (yuyu@mail.hust.edu.cn)

    DOI:10.1364/PRJ.416887

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