Infrared and Laser Engineering, Volume. 44, Issue 11, 3238(2015)

Ablation rate of high frequency picosecond laser micromachining quartz substrated Al film

Jin Fangyuan1,2、*, Chen Bo1, E Shulin1, Wang Haifeng1, and Xing Yan1,2
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    Jin Fangyuan, Chen Bo, E Shulin, Wang Haifeng, Xing Yan. Ablation rate of high frequency picosecond laser micromachining quartz substrated Al film[J]. Infrared and Laser Engineering, 2015, 44(11): 3238

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    Paper Information

    Category: 激光技术及应用

    Received: Mar. 5, 2015

    Accepted: Apr. 15, 2015

    Published Online: Jan. 26, 2016

    The Author Email: Fangyuan Jin (jinfangyuan610@163.com)

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