Optics and Precision Engineering, Volume. 17, Issue 3, 519(2009)

Precision estimation of aspheric surface by stitching interferometry based on correcting aberration

QIAO Yu-jing* and L Ning
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  • [in Chinese]
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    References(9)

    [1] [1] KIM C J,WYANT J. Subaperture test of a large flat on a fast spherical surface[J]. Opt. Soc. Am.,1981,71,15-87.

    [4] [4] WANG X K, WANG L H, ZHANG X J. Testing asphere by subaperture stitching interferometric method [J]. Opt. Precision Eng., 2006,15(2):192-197. (in Chinese)

    [5] [5] MURPHY P. Stitching interferometry: a flexible solution for surface metrology [J]. Optics and Photonics News, 2003,5(14):38-43.

    [7] [7] ZHANG M Y, LI X N. Accuracy analysis of stitching interferometry for test of large diameter mirror[J]. Journal of Applied Optics, 2006,27(5):447-449. (in Chinese)

    [9] [9] WANG S G, CHEN M, CHEN P. Linear Statistical Models:Linear Regression and Analysis of Variance[M]. Beijing: Higher Education Press,2004. (in Chinese)

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    QIAO Yu-jing, L Ning. Precision estimation of aspheric surface by stitching interferometry based on correcting aberration[J]. Optics and Precision Engineering, 2009, 17(3): 519

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    Paper Information

    Category:

    Received: Mar. 17, 2008

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: Yu-jing QIAO (qiaoyujing@163.com)

    DOI:

    CSTR:32186.14.

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