Semiconductor Optoelectronics, Volume. 42, Issue 1, 110(2021)
Vibration Analysis and Precision Optimization of Laser Online Thickness Measurement
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SONG Huaxiong, ZHANG Yun, SONG Lan, TAN Penghui, HUANG Tianlun. Vibration Analysis and Precision Optimization of Laser Online Thickness Measurement[J]. Semiconductor Optoelectronics, 2021, 42(1): 110
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Received: Nov. 3, 2020
Accepted: --
Published Online: Mar. 18, 2021
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