Fig. 1. Optical path of projection in vertical direction

Fig. 2. Optical path of projection in horizontal direction

Fig. 3. Effect diagram of projection system

Fig. 4. Diagram of chip imaging area

Fig. 5. Angle between main incident light from maximum field of view and the first surface normal line

Fig. 6. Change diagram of Petzval surface with curvature of surface

Fig. 7. Diagram of initial optical structure

Fig. 8. Diagram of final optical structure

Fig. 9. Spot diagram

Fig. 10. Curves of lateral chromatic aberration

Fig. 11. Curves of curvature and distortion

Fig. 12. Curves of relative illumination

Fig. 13. Curves of MTF