Fig. 1. Optical path diagram of phase-shift interference detection

Fig. 2. Schematic diagram of wavefront defocus

Fig. 3. Interferograms corresponding to different defocusing amount

Fig. 4. Unwrapping phase diagrams corresponding to different NA

Fig. 5. Flow chart of defocusing error correction

Fig. 6. Results diagram of each step of calibration algorithm

Fig. 7. Comparison between original and measured values of defocusing errors

Fig. 8. Final correction accuracy diagram for different defocusing amount

Fig. 9. Experimental interference fringe patterns

Fig. 10. Fitting diagram of wavefront aberration after auxiliary installation and adjustment