Infrared and Laser Engineering, Volume. 48, Issue 9, 916002(2019)
Influence of thin-film residual stress and surface impurities on fatigue life of deformable mirror
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Yu Xia, Wang Jiaqiu, Zhang Bin. Influence of thin-film residual stress and surface impurities on fatigue life of deformable mirror[J]. Infrared and Laser Engineering, 2019, 48(9): 916002
Paper Information
Category: 光学器件
Received: Apr. 11, 2019
Accepted: May. 21, 2019
Published Online: Oct. 12, 2019
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