Infrared and Laser Engineering, Volume. 48, Issue 9, 916002(2019)

Influence of thin-film residual stress and surface impurities on fatigue life of deformable mirror

Yu Xia, Wang Jiaqiu, and Zhang Bin
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    Yu Xia, Wang Jiaqiu, Zhang Bin. Influence of thin-film residual stress and surface impurities on fatigue life of deformable mirror[J]. Infrared and Laser Engineering, 2019, 48(9): 916002

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    Paper Information

    Category: 光学器件

    Received: Apr. 11, 2019

    Accepted: May. 21, 2019

    Published Online: Oct. 12, 2019

    The Author Email:

    DOI:10.3788/irla201948.0916002

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