Acta Photonica Sinica, Volume. 39, Issue 2, 296(2010)

Properties of ZnO Thin Films with Effect of Substrate Temperature by PLD

SU Xue-qiong... WANG Li*, CHEN Jiang-bo, KONG Le, LIU Hong-mei and ZHANG Xin-ping |Show fewer author(s)
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    References(15)

    [1] [1] ZHANG Duan-ming,ZHAO Xiu-jian,LI Zhi-hua,et al.Pulsed laser deposition dynamics and thin film deposited onto glass [M].Wuhan:Science and Technology Publishing Company in Hubei,2006:195-196.

    [2] [2] ZHU B L,SUN X H,ZHAO X Z,et al.The effects of substrate temperature on the structure and properties of ZnO films prepared by pulsed laser deposition.[J].Vacuum,2008,82:495-500.

    [3] [3] XU J,PAN Q,SHUN Y,et al.Grain size control and gas sensing properties of ZnO gas sensor[J].Sensor Actuat,2000,B66:277-279.

    [4] [4] HINZE J,ELIMER K.In situ measurement of mechanical stress in polycrystalline zinc-oxide thin films prepared by magnetron sputtering [J].Appl Phys,2000,88(5):2443.

    [5] [5] HAGA K,SUZUKI T,KASHIWABA Y,et al.High-quality ZnO films prepared on Si wafers by low-pressure MO-CVD [J].Thin Solid Films,2003,433:131.

    [8] [8] SHIN P-K,AYA Y,et al.Application of pulsed laser deposited zinc oxide films to thin transistor device[J].Thin Solid Films,2008,516:3767-3771.

    [9] [9] SUCHEA M,CHRISTOULAKIS S,KATHARAKIS M,et al.Substrate temperature influence on the properties of nanostructured ZnO transparent ultrathin films grown by PLD [J].Applied Surface Science,2007,253:8141-8145.

    [10] [10] HUANG Yan-qiu,LIU Mei-dong,LI Zhen,et al.Raman spectroscopy study of ZnO - based ceramic films fab-ricated by sol - gel process [J].Materials Science and Engineering B,2003,97:111-116.

    [12] [12] HE Jian-ting,ZHUANG Hui-zhao,XUE Chen-shan,et al.Effect of substrate temperature on microstructural and optical properties of ZnO films grown by pulsed laser deposition[J].Rare Metals,2006,25(2):161.

    [13] [13] WANG Zhao-yang,HU Li-zhong,ZHAO Jie,et al.Effect of the variation of temperature on the structural and optical properties of ZnO thin films prepared on Si (111) substrates using PLD[J].Vacuum,2005,78:53-57.

    [14] [14] JIN B J,IM S,LEE S Y.Violet and UV luminescence emitted from ZnO thin films grown on sapphire by pulsed laser deposition[J].Thin Solid Films,2000,366:107.

    [15] [15] LOOK D C,FARLOW G C,REUNCHAN P,et al.Evidence for native-defect donors in n-type ZnO[J].Phys Rev Lett,2005,95:225502.

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    SU Xue-qiong, WANG Li, CHEN Jiang-bo, KONG Le, LIU Hong-mei, ZHANG Xin-ping. Properties of ZnO Thin Films with Effect of Substrate Temperature by PLD[J]. Acta Photonica Sinica, 2010, 39(2): 296

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    Paper Information

    Received: Mar. 16, 2009

    Accepted: --

    Published Online: May. 24, 2010

    The Author Email: Li WANG (Lwang.1@bjut.edu.cn)

    DOI:

    CSTR:32186.14.

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