[2] [2] SCHENK H,DUERR P,KUNZE D,et al.A resonantly excited 2D-micro-scanning-mirror with large deflection ［J］.Sensors and Actuators A:Physical,2001,89:104-111.

[4] [4] UREY H,DEWITT F,POWELL K D,et al.High-frequency raster pinch correction scanner for retinal scanning displays［J］.Proceeding of SPIE,2001,4561:45-54.

[5] [5] ROSCHER K U,GRATZ H,SCHENK H,et al.Low cost projection device with a 2-dimensional resonant microscanning mirror ［J］.Proceedings of SPIE,2004,5348:22-31.

[6] [6] LI Z,YUAN W Z,WU M,et al.Micro scanning mirrors with laser diode for pattern generation ［J］.Acta Photonica Sinica,2011,40(11):32-39.

[8] [8] NIESTEN M,MASOOD T,MILLER J,et al.Scanning laser beam displays based on a 2-D MEMS ［J］.Proceedings of SPIE,2010,7723:77230U1-77230U10.