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Infrared and Laser Engineering, Volume. 45, Issue 6, 620001(2016)

Fabrication of PMMA micro lens array based on X-ray moving lithography

Li Yigui1,*... Yan Ping1, Huang Yuan1 and Sugiyama Susumu2 |Show fewer author(s)
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    Li Yigui, Yan Ping, Huang Yuan, Sugiyama Susumu. Fabrication of PMMA micro lens array based on X-ray moving lithography[J]. Infrared and Laser Engineering, 2016, 45(6): 620001

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    Paper Information

    Category: 光电器件与微系统

    Received: Oct. 11, 2015

    Accepted: Nov. 27, 2015

    Published Online: Jul. 26, 2016

    The Author Email: Yigui Li (ygli@sit.edu.cn)

    DOI:10.3788/irla201645.0620001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology