[1] [1] Zhang Ming, Ren Jianwen, Chen Wen, et al. Design and analysis of photorefractive long-period waveguide grating coupler［J］. Acta Optica Sinica, 2015, 35(3): 0313002.

[2] [2] Zhang Ailing, He Peidong, Pan Honggang, et al. Design of electrically controlled double wavelength orthogonal polarization tunable filter［J］. Laser & Optoelectronics Progress, 2015, 52(7): 072301.

[3] [3] Zhang Ailing, Tian Hongmiao, Li Qingqing, et al. Characteristics of high-order Bragg waveguide grating based on phase-mask method［J］. Laser & Optoelectronics Progress, 2017, 54(1): 010603.

[4] [4] Kocabas A, Aydinli A. Polymeric waveguide Bragg grating filter using soft lithography［J］. Optics Express, 2006, 14(22): 10228-10232.

[5] [5] Kobayashi S, Sawada M, Suda T, et al. Narrow tunable polysilane optical waveguide Bragg grating filters［J］. IEEE Photonics Technology Letters, 2007, 19(6): 363-365.

[6] [6] Wang Yiping, Chen Jianping, Li Xinwan, et al. Fast tunable electro-optic polymer waveguide gratings［J］. Acta Physica Sinica, 2005, 54(10): 4782-4788.

[7] [7] Chang A S P, Morton K J, Tan H, et al. Tunable liquid crystal-resonant grating filter fabricated by nanoimprint lithography［J］. IEEE Photonics Technology Letters, 2007, 19(19): 1457-1459.

[8] [8] Wong W H, Pun E Y B, Chan K S. Electron beam direct-write tunable polymeric waveguide grating filter［J］. IEEE Photonics Technology Letters, 2003, 15(12): 1731-1733.

[9] [9] Zhang Ming, Meng Huiyun, Chen Liuwei, et al. Tunable filtering scheme and characteristics analysis based on photorefractive gratings［J］. Opto-Electronic Engineering, 2012, 39(4): 96-101.

[10] [10] Pierno L, Dispenza M, Secchi A, et al. A lithium niobate electro-optic tunable Bragg filter fabricated by electron beam lithography［J］. Journal of Optics A: Pure and Applied Optics, 2008, 10(6): 401-405.

[11] [11] Ghoumid K, Benkelfat B E, Ferriere R, et al. Wavelength-selective Ti∶LiNbO3 multiple Y-branch coupler based on focused ion beam milled Bragg reflectors［J］. IEEE Journal of Lightwave Technology, 2011, 29(23): 3536-3541.

[12] [12] Son N, Kim K, Kim J, et al. Near-infrared tunable lasers with polymer waveguide Bragg gratings［J］. Optics Express, 2012, 20(2): 827-934.

[13] [13] Pang Mengyao, Cheng Xinli, Qin Changfa, et al. A study on lithography process for the Ruihong RZJ-304 photoresist［J］. Journal of Suzhou University of Science and Technology, 2015, 32(3): 20-24.

[14] [14] Quirk M, Serda J. Semiconductor manufacturing technology［M］. New Jersey: Prentice Hall, 2001.

[15] [15] Grobnic D, Mihailov S J, Smelser C W, et al. Bragg gratings made in reverse proton exchange lithium niobate waveguides with a femtosecond IR laser and a phase mask［J］. IEEE Photonics Technology Letters, 2005, 17(7): 1453-1455.

[16] [16] Erdogan T. Fiber grating spectra［J］. IEEE Journal of Lightwave Technology, 1997, 15(8): 1277-1294.

[17] [17] Zhou Huijuan, Meng Zhou, Liao Yi. Frequency shift characteristics analysis of LiNbO3 waveguide electro-optic intensity modulator［J］. Chinese J Lasers, 2009, 36(4): 901-905.

[18] [18] Macario J, Schuetz C A, Yao P, et al. Development and characterization of LiNbO3 electro-optic phase modulator at 220 GHz for millimeter-wave imaging system［C］. SPIE, 2011, 8188: 81880E.