Fig. 1. Schematic of KB microscopy system optical assembly

Fig. 2. Optical path of aspherical KB microscope

Fig. 3. Influence of optical parameters on spatial resolution of aspherical KB microscope

Fig. 4. Grazing incidence focusing of the aspheric mirror

Fig. 5. Theoretical calculation of vertical axis aberration of aspherical KB microscope and simulation result of ray tracing

Fig. 6. Reflectivity of W/Si multilayer at 6.4 keV

Fig. 7. Result of aspherical KB microscope imaging test

Fig. 8. Spatial resolution of aspherical KB microscope