Optics and Precision Engineering, Volume. 18, Issue 12, 2583(2010)
Implementation and experiments of micromechanical differential silicon resonant accelerometer
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SHI Ran, QIU An-ping, SU Yan. Implementation and experiments of micromechanical differential silicon resonant accelerometer[J]. Optics and Precision Engineering, 2010, 18(12): 2583
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Received: Mar. 12, 2010
Accepted: --
Published Online: Jan. 26, 2011
The Author Email: Ran SHI (whatghosts@hotmail.com)
CSTR:32186.14.
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