Optics and Precision Engineering, Volume. 18, Issue 12, 2583(2010)
Implementation and experiments of micromechanical differential silicon resonant accelerometer
To improve the performance of MEMS accelerometers, a micromechanical Silicon Resonant Accelerometer (SRA) prototype fabricated by Deep Dry Silicon on Glass (DDSOG) process was introduced, and some experiments for the accelerometer were performed. The structure, processing methods and the interface circuit of SRA were discribed in detail. The SRA adopted the differential structure composed of two identical resonators to eliminate common mode errors, and used the micro lever mechanism to magnify the scale factor. An interface circuit using the Automatic Gain Control (AGC) circuit was designed to maintain the oscillator stability, which could drive the resonator to achieve self-oscillation and to detect the frequency output. The relation between input acceleration and SRA frequency output was researched and the performance parameters of the prototype resonant accelerameter were tested. The test results show these performance parameters to be the sensitivity in 143 Hz/g, input range in ±50 g, bias stability in 1.2 mg, bias repeatability in 0.88 mg and the threshold in 170 μg. Moreover, it is found that the temperature coefficient of glass substrate is larger than that of the silicon structure in the DDSOG process, which affects the bias temperature sensitivity of resonators. Therefore,it points out that the processing method should be improved further.
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SHI Ran, QIU An-ping, SU Yan. Implementation and experiments of micromechanical differential silicon resonant accelerometer[J]. Optics and Precision Engineering, 2010, 18(12): 2583
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Received: Mar. 12, 2010
Accepted: --
Published Online: Jan. 26, 2011
The Author Email: Ran SHI (whatghosts@hotmail.com)
CSTR:32186.14.