Semiconductor Optoelectronics, Volume. 41, Issue 5, 676(2020)

Structural Design and Pressure Sensitivity of Graphene Pressure Sensors

WANG Dong... QIN Yafei*, YUAN Ruibo and YANG Youpeng |Show fewer author(s)
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    References(13)

    [1] [1] Bolotin K, Sikes K J, Jiang Z, et al. Ultrahigh electron mobility in suspended graphene[J]. Solid State Communications, 2008, 146(9): 351-355.

    [2] [2] Morozov S V, Novoselov K S, Katsnelson M I, et al. Giant intrinsic carrier mobilities in graphene and its bilayer[J]. Phys. Rev. Lett., 2008, 100(1): 016602.

    [3] [3] Miao F, Bao W, Zhang H, et al. Premature switching in graphene Josephson transistors[J]. Solid State Communications, 2009, 149(27): 1046-1049.

    [6] [6] Hosseinzadegan H, Todd C, Lal A, et al. Graphene has ultra high piezoresistive gauge factor[C]// Proc. Inter. Conf. on Micro Electro Mechanical Systems, 2012: 611-614.

    [7] [7] Zhu S E, Krishna G M, Zhang C, et al. Graphene based piezoresistive sensors[J]. Appl. Phys. Lett., 2013, 102(16): 666-692.

    [8] [8] Smith A D, Vaziri S, Delin A, et al. Strain engineering in suspended graphene devices for pressure sensor applications[C]// Proc. Inter. Conf. on Ultimate Integration on Silicon, 2012: 21-24.

    [9] [9] Lou Z, Chen S, Wang L, et al. An ultra-sensitive and rapid response speed graphene pressure sensors for electronic skin and health monitoring[J]. Nano Energy, 2016, 23(23): 7-14.

    [11] [11] Dean C, Young A, Meric I, et al. Boron nitride substrates for high-quality graphene electronics[J]. Nature Nanotechnol., 2010, 5(10): 722-726.

    [12] [12] Vlassak J J, Nix W D. A new bulge test technique for the determination of Youngs modulus and Poissons ratio of thin films[J]. J. of Materials Research, 1992, 7(12): 3242-3249.

    [13] [13] Ma Y, Wang G, Chen Y, et al. Extended Hencky solution for the blister test of nanomembrane[J]. Extreme Mechanics Lett., 2018: 69-78.

    [15] [15] Lee C, Wei X, Kysar J W, et al. Measurement of the elastic properties and intrinsic strength of monolayer graphene[J]. Science, 2008, 321(5887): 385-388.

    [16] [16] Jiang S, Wang X, Shi S, et al. Simulation of deflection and stress for MEMS pressure sensor based on graphene[C]// Proc. Inter. Conf. on Electronic Packaging Technology, 2013: 462-466.

    [17] [17] Vella D, Bico J, Boudaoud A, et al. The macroscopic delamination of thin films from elastic substrates[J]. Proc. of the National Academy of Sciences of the United States of America, 2009, 106(27): 10901-10906.

    CLP Journals

    [1] ZHAO Cheng, ZHOU Jiacheng, YUAN Shuya, WANG Debo. Design and Research on a Suspended Graphene Pressure Sensor Arrays[J]. Microelectronics, 2022, 52(3): 449

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    WANG Dong, QIN Yafei, YUAN Ruibo, YANG Youpeng. Structural Design and Pressure Sensitivity of Graphene Pressure Sensors[J]. Semiconductor Optoelectronics, 2020, 41(5): 676

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    Paper Information

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    Received: Jul. 1, 2020

    Accepted: --

    Published Online: Jan. 19, 2021

    The Author Email: Yafei QIN (qinyafei_kmust@foxmail.com)

    DOI:10.16818/j.issn1001-5868.2020.05.014

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