[1] [1] Wilson T. Confocal Microscopy [M]. New York：Academic Press，1990.

[2] [2] WANG Yong-hong，YU Xiao-fen，YU Jian-wei，et al. A survey of the non-scanning 3-D profile confocal detecting [J]. Chinese Journal of Scientific Instrument，2003，24(s)：8-11.

[3] [3] Tiziani H J，Uhde H M. Three-dimensional analysis by a microlens-array confocal arrangement [J]. Appl Opt (S0003-6935),1994，33(4)：567-572.

[4] [4] TIAN Wei-jian，YANG Jian-wen，BAO Zheng-kang，et al. New method for measuring the properties of optical systems with micro-optic components [C]// Automated Optical Inspection for Industry，Beijing，China，Nov 6-7，1996，2899：263-268.

[5] [5] Ishihara M，Sasaki H. High-speed surface measurement using a nonscanning multiple-beam confocal microscope [J]. Opt Eng(S0091-3286)，1999，38(6)：1035-1040.

[6] [6] TIAN Wei-jian，DING Zhi-hua，GUO Lü-rong，et al. A confocal method for measuring whole-field three-dimentional surface topography [J]. Acta Optica Sinica，1998，18(6)：757-761.

[7] [7] YU Qing，YU Xiao-fen，BI Mei-hua . Research on high-precision acquisitive method of surface coordinate information based on parallel confocal microscopy [J]. Acta Optica Sinica，2009，11(29)：3057-3060.

[8] [8] Van Kessel P F，Hornbeck L J，Meier R E，et al. MEMS-based projection display [J]. Proc. of the IEEE(S0018-9219)，1998，86(8)：1687-1704.

[9] [9] Kawasaki，Hornbeck L J. Digital light processing and MEMS：reflecting the digital display needs of the networked society [C]//Micro-Optical Technologies for Measurement，Sensors，and Microsystems，Besancon，France，Jun 12-13，1996，2783:2-13.

[10] [10] WANG Yong-hong，YU Xiao-fen，LI Rui-jun，et al. Non-scanning 3D profile parallel confocal detecting system based on DLP technology [C]// Fifth International Symposium on Instrumentation and Control Technology，Beijing，China，Oct 24-27,2003，5253：437-441.