Fig. 1. Major axis length of spot on sample surface versus incident angle

Fig. 2. Area of spot on sample surface versus incident angle

Fig. 3. Measured results of elliptical polarization paremeters of Ta2O5 films. (a) ψ(λ,θ); (b) Δ(λ,θ)

Fig. 4. Measured results of elliptical polarization paremeters of HfO2 films. (a) ψ(λ,θ); (b) Δ(λ,θ)

Fig. 5. (a) Constant term of refractive index, (b) film layer thickness, and (c) surface layer thickness of Ta2O5 films versus major axis length of elliptic spot

Fig. 6. (a) Constant term of refractive index, (b) film layer thickness, and (c) surface layer thickness of HfO2 films versus major axis length of elliptic spot

Fig. 7. Profilogram of HfO2 film surface

Fig. 8. Profilogram of Ta2O5 film surface

Fig. 9. Measured and fitting results of reflectivity of Ta2O5 films by reflectance spectroscopy method

Fig. 10. Measured and fitting results of reflectivity of HfO2 films by reflectance spectroscopy method

Fig. 11. Schematic of spot change in spectroscopic ellipsometry measurement