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Spectroscopy and Spectral Analysis, Volume. 39, Issue 6, 1736(2019)

Near Infrared Spectroscopy Process Pattern Fault Detection Based on Mutual Information Entropy

GAO Shuang, LUAN Xiao-li, and LIU Fei
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    GAO Shuang, LUAN Xiao-li, LIU Fei. Near Infrared Spectroscopy Process Pattern Fault Detection Based on Mutual Information Entropy[J]. Spectroscopy and Spectral Analysis, 2019, 39(6): 1736

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    Paper Information

    Received: May. 6, 2018

    Accepted: --

    Published Online: Jul. 10, 2019

    The Author Email:

    DOI:10.3964/j.issn.1000-0593(2019)06-1736-06

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology