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Acta Optica Sinica, Volume. 25, Issue 7, 994(2005)

Studies on the Micro-Structure and Laser Damage Threshold of ZrO2 Thin Films Deposited at Different Parameters

[in Chinese]1,2、*, [in Chinese]2, [in Chinese]2, [in Chinese]2, [in Chinese]2, [in Chinese]2, [in Chinese]1, and [in Chinese]1
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    [1] [1] F. Rainer, F. P. De Marco, M. C. Staggs et al.. A historical perspective on fifteen years of laser damage thresholds at LLNL[C]. Proc. SPIE, 1994, 2114: 9～23

    [2] [2] Peifu Gu, Jinfa Tang. Excimer laser reflectors[C]. Proc. SPIE, 1989, 1166: 533～541

    [3] [3] Z. X. Fan, R. Y. Fan, X. F. Tang. Ion assited deposition of optical coatings[C]. Proc. SPIE, 1996, 2714: 360～363

    [4] [4] Jianping Hu, Ping Ma, Qiao Xu et al.. Effect of λ/2 SiO2 overcoat on the laser damag of HfO2/SiO2 high-reflector coatings[J]. Chin. Opt. Lett., 2003, 1(6): 340～342

    [5] [5] R. Guinebretiere, B. Soulestin, A. Dauger. XRD and TEM study of heteroepitaxial growth of zirconia on magnesia single crystal[J]. Thin Solid Films, 1998, 319: 197～201

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    [2] Cui Xiao, Tao Chunxian, Hong Ruijin, Zhang Dawei. Influence of Ion-Beam Assistance and Annealing on Output Power of He-Cd Laser Reflector[J]. Chinese Journal of Lasers, 2013, 40(11): 1107001

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Studies on the Micro-Structure and Laser Damage Threshold of ZrO2 Thin Films Deposited at Different Parameters[J]. Acta Optica Sinica, 2005, 25(7): 994

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    Paper Information

    Category: Thin Films

    Received: Jul. 2, 2004

    Accepted: --

    Published Online: May. 22, 2006

    The Author Email: (map@263.net)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology