Ultra-Precision and High-Speed Laser Interferometric Displacement Measurement Technology and Instrument

Hongxing Yang; Haijin Fu; Pengcheng Hu; Ruitao Yang; Xu Xing; Liang Yu; Di Chang; Jiubin Tan

doi:10.3788/LOP202259.0922018

Laser & Optoelectronics Progress, Volume. 59, Issue 9, 0922018(2022)

Ultra-Precision and High-Speed Laser Interferometric Displacement Measurement Technology and Instrument

Hongxing Yang^1,2, Haijin Fu^1,2, Pengcheng Hu^1,2、*, Ruitao Yang^1,2, Xu Xing^1,2, Liang Yu^1,2, Di Chang^1,2, and Jiubin Tan^1,2

Author Affiliations

¹Institute of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, Heilongjiang , China

²Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry and Information Technology, Harbin Institute of Technology, Harbin 150080, Heilongjiang , China

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Hongxing Yang, Haijin Fu, Pengcheng Hu, Ruitao Yang, Xu Xing, Liang Yu, Di Chang, Jiubin Tan. Ultra-Precision and High-Speed Laser Interferometric Displacement Measurement Technology and Instrument[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922018

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Paper Information

Category: Optical Design and Fabrication

Received: Feb. 9, 2022

Accepted: Mar. 1, 2022

Published Online: May. 10, 2022

The Author Email: Hu Pengcheng (hupc@hit.edu.cn)

DOI:10.3788/LOP202259.0922018

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology