Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis

Fig. 5. Results of the comparison experiments between the auto-collimator and our device for measuring (a) the tilt motion error around the Y axis and (b) the angular positioning error.

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Table 1. Corresponding Detectors and Expressions for Measuring Each DOF Motion Error of a Rotary Axis

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Table 1. Corresponding Detectors and Expressions for Measuring Each DOF Motion Error of a Rotary Axis

Motion Error	Detector	Expression
$δ_{x} (θ)$	Interferometer	Omitted
$δ_{y} (θ)$	QD1 or QD2	$Δ Y_{QD 1} / 2$ or $Δ Y_{QD 2} / 2$
$δ_{z} (θ)$	QD1 or QD2	$Δ Z_{QD 1} / 2$ or $Δ Z_{QD 2} / 2$
$ε_{x} (θ)$	QD1 and QD2	$(Δ Z_{QD 1} - Δ Z_{QD 2}) / 2 h$
$ε_{y} (θ)$	PSD2	$Δ Z_{PSD 2} / 2 f_{2}$
$ε_{z} (θ)$	PSD2	$Δ Y_{PSD 2} / 2 f_{2} + θ_{ref} - θ$

Table 2. Measurement Resolution, Standard Deviation of Stability (SDS) and Maximum Repeatability Value (MRV)

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Table 2. Measurement Resolution, Standard Deviation of Stability (SDS) and Maximum Repeatability Value (MRV)

Errors	Resolution	SDS	MRV
$δ_{x} (θ)$	20 pm	$0.03 μ m$	$3.9 μ m$
$δ_{y} (θ)$	$0.04 μ m$	$0.07 μ m$	$3.0 μ m$
$δ_{z} (θ)$	$0.04 μ m$	$0.04 μ m$	$0.7 μ m$
$ε_{x} (θ)$	0.27 arcsec	0.05 arcsec	2.5 arcsec
$ε_{y} (θ)$	0.26 arcsec	0.17 arcsec	2.4 arcsec
$ε_{z} (θ)$	0.26 arcsec	0.06 arcsec	24.8 arcsec

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Jiakun Li, Qibo Feng, Chuanchen Bao, Bin Zhang. Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis[J]. Chinese Optics Letters, 2019, 17(1): 011203

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Sep. 14, 2018

Accepted: Nov. 23, 2018

Posted: Dec. 3, 2018

Published Online: Jan. 17, 2019

The Author Email: Qibo Feng (qbfeng@bjtu.edu.cn)

DOI:10.3788/COL201917.011203

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology