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Acta Optica Sinica, Volume. 42, Issue 21, 2105001(2022)

Design Method of Phase Grating Mark in Resonance Domain

Guangying Zhou1,2, Yuejing Qi1,2、*, Wei Qi1, Zengxiong Lu1,2, and Jiani Su1
Author Affiliations
  • 1Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Article index updated:Jun. 4, 2024

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    Guangying Zhou, Yuejing Qi, Wei Qi, Zengxiong Lu, Jiani Su. Design Method of Phase Grating Mark in Resonance Domain[J]. Acta Optica Sinica, 2022, 42(21): 2105001

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    Paper Information

    Category: Diffraction and Gratings

    Received: Mar. 14, 2022

    Accepted: May. 16, 2022

    Published Online: Nov. 4, 2022

    The Author Email: Qi Yuejing (qiyuejing@ime.ac.cn)

    DOI:10.3788/AOS202242.2105001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology