Evolution of sapphire surface nanostructure with distance of impurity target

Qian Bi; Zhili Chen; Yuzhao Liu; Li Tang; Yingxue Xi; Weiguo Liu

doi:10.3788/IRLA20200302

Infrared and Laser Engineering, Volume. 50, Issue 2, 20200302(2021)

Evolution of sapphire surface nanostructure with distance of impurity target

Qian Bi, Zhili Chen, Yuzhao Liu, Li Tang, Yingxue Xi, and Weiguo Liu

Shaanxi Province Key Laboratory of Thin Film Technology and Optical Test, School of Photoelectric Engineering, Xi’an Technological University, Xi’an 710021, China

show less

Abstract Get PDF(in Chinese)

Figures & Tables(9)

Fig. 1. [in Chinese]

Fig. 2. [in Chinese]

Fig. 3. [in Chinese]

Fig. 4. [in Chinese]

Fig. 5. [in Chinese]

Fig. 6. [in Chinese]

Fig. 7. [in Chinese]

Fig. 8. [in Chinese]

Table 1. [in Chinese]
View table
View in Article
Table 1. [in Chinese]
Parameters Value
Angle of incidence/(°) 65
Ion beam current density/μA∙cm⁻² 487
Energy of incident ion beam/eV 1000
Erosion duration/min 60

Tools

Get Citation

Copy Citation Text

Qian Bi, Zhili Chen, Yuzhao Liu, Li Tang, Yingxue Xi, Weiguo Liu. Evolution of sapphire surface nanostructure with distance of impurity target[J]. Infrared and Laser Engineering, 2021, 50(2): 20200302

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites