Evolution of sapphire surface nanostructure with distance of impurity target

Qian Bi; Zhili Chen; Yuzhao Liu; Li Tang; Yingxue Xi; Weiguo Liu

doi:10.3788/IRLA20200302

Infrared and Laser Engineering, Volume. 50, Issue 2, 20200302(2021)

Evolution of sapphire surface nanostructure with distance of impurity target

Qian Bi... Zhili Chen, Yuzhao Liu, Li Tang, Yingxue Xi and Weiguo Liu |Show fewer author(s)

Shaanxi Province Key Laboratory of Thin Film Technology and Optical Test, School of Photoelectric Engineering, Xi’an Technological University, Xi’an 710021, China

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Abstract Get PDF(in Chinese)

Figures & Tables(9)

Fig. 1. [in Chinese]

Fig. 2. [in Chinese]

Fig. 3. [in Chinese]

Fig. 4. [in Chinese]

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Fig. 7. [in Chinese]

Fig. 8. [in Chinese]

Table 1. [in Chinese]
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Table 1. [in Chinese]
Parameters Value
Angle of incidence/(°) 65
Ion beam current density/μA∙cm⁻² 487
Energy of incident ion beam/eV 1000
Erosion duration/min 60

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Qian Bi, Zhili Chen, Yuzhao Liu, Li Tang, Yingxue Xi, Weiguo Liu. Evolution of sapphire surface nanostructure with distance of impurity target[J]. Infrared and Laser Engineering, 2021, 50(2): 20200302

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