Semiconductor Optoelectronics, Volume. 41, Issue 2, 182(2020)
Simulation and Design of Low Voltage Driven F-P Cavity Tunable Filter
[1] [1] Saari H, Mannila R, Antila J, et al. Miniaturised gas sensor using a micromachined Fabry-Perot interferometer[J]. Preparing for the Future, 2000, 10(3): 4-5.
[2] [2] Calaza C, Fonseca L, Moreno M, et al. A surface micromachining process for the development of a medium-infrared tuneable Fabry-Perot interferometer[J]. Sensors and Actuators A (Physical), 2004, 113(1): 39-47.
[3] [3] Blomberg M, Torkkeli A, Lehto A, et al. Electrically tuneable micromachined Fabry-Perot interferometer in gas analysis[J]. Physica Scripta, 2006, 1997(T69): 119.
[4] [4] Antila J, Mannila R, Kantojarvi, et al. Spectral imaging device based on a tuneable MEMS Fabry-Perot interferometer[J]. Proc. of SPIE, 2012, 8374: 83740F.
[5] [5] Neumann N, Ebermann M, Hiller K, et al. Tunable infrared detector with integrated micromachined Fabry-Perot filter[J]. J. of Microlithography Microfabrication & Microsystems, 2008, 7(2): 124-128.
[6] [6] Fischer A C, Forsberg F, Lapisa M, et al. Integrating MEMS and ICs[J]. Microsystems & Nanoengineering, 2015, 1: 15005.
[7] [7] Oliver J, Lee W B, Lee H N. Filters with random transmittance for improving resolution in filter-array-based spectrometers[J]. Opt. Express, 2013, 21(4): 3969-89.
[8] [8] Zhang A, Yuan Y, Yue Z, et al. Design of multi-wavelength tunable filter based on lithium niobate[J]. Opt. Communications, 2018, 415: 13-17.
[9] [9] Ayerden N P, Ghaderi M, Enoksson P, et al. A miniaturized optical gas-composition sensor with integrated sample chamber[J]. Sensors & Actuators B (Chemical), 2016, 236: 917-925.
[10] [10] Chen Q, Cole G D, Bjorlin E S, et al. First demonstration of a MEMS tunable vertical-cavity SOA[J]. IEEE Photon. Technol. Lett., 2004, 16(6): 1438-1440.
[11] [11] Liu B, Jie L, Liu H, et al. Diaphragm based long cavity Fabry-Perot fiber acoustic sensor using phase generated carrier[J]. Opt. Communications, 2017, 382: 514-518.
[12] [12] Ahmed M F, Xue T, Wu B, et al. High quality factor coaxial cable Fabry-Perot resonator for sensing applications[J]. IEEE Sensors J., 2017, 17(10): 3052-3057.
[13] [13] Roychoudhuri C, Hercher M. Stable multipass Fabry-Perot interferometer: design and analysis[J]. Appl. Opt., 1977, 16(9): 2514-20.
Get Citation
Copy Citation Text
REN Haojie, HOU Haigang, ZHU Lihui, HUANG Qingwei. Simulation and Design of Low Voltage Driven F-P Cavity Tunable Filter[J]. Semiconductor Optoelectronics, 2020, 41(2): 182
Category:
Received: Dec. 10, 2019
Accepted: --
Published Online: Jun. 17, 2020
The Author Email: Lihui ZHU (lhzhu@i.shu.edu.cn)