Acta Optica Sinica, Volume. 18, Issue 1, 33(1998)

Spectroscopic Ellipsometry and the Sense of Elliptical Polarization

[in Chinese] and [in Chinese]
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    References(7)

    [1] [1] D. E. Aspnes, New developmentsins pectroellipsomtry: the challenge of surfaces. Thin Solid Films, 1993, 233(1): 1~8

    [2] [2] D. E. Aspnes, A. A. Studna, High precision scanning ellipsometer. Appl. Opt., 1975, 14(2): 220~228

    [3] [3] M. Born, E. Wolf, Principles of Optics, Sixth Edition, Pergamon Press, New York, 1980: 24~25

    [4] [4] R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light, North-Holland Publishing Co., Amsterdam, 1977: 287~288

    [5] [5] P. S. Hauge, F. H. Dill, IBM J. Research & Development, 1973, 17(6): 472~489

    [6] [6] C. Kittel, Introduction to Solid State Physics, Sixth Edition, John Wiley & Sons, Inc., New York, 1986: 292~295

    [8] [8] D. E. Aspnes, A. A. Studna, Dielectric functions and optical parameters of Si, Ge, GaP, GaAs, GaSb, InP, InAs, and InSb from 1.5 to 6.0 eV. Phys. Rev. (B), 1983, 27(2): 985~1009

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    [in Chinese], [in Chinese]. Spectroscopic Ellipsometry and the Sense of Elliptical Polarization[J]. Acta Optica Sinica, 1998, 18(1): 33

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    Paper Information

    Category: Spectroscopy

    Received: Oct. 29, 1996

    Accepted: --

    Published Online: Oct. 18, 2006

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