Optics and Precision Engineering, Volume. 27, Issue 2, 302(2019)
Polishing method for polyimide membranes based on reactive ion etching
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YANG Zheng, JIN Zhi-wei, CHEN Jian-jun, RAO Xian-hua, YIN Shao-yun, WU Peng. Polishing method for polyimide membranes based on reactive ion etching[J]. Optics and Precision Engineering, 2019, 27(2): 302
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Received: Jul. 2, 2018
Accepted: --
Published Online: Apr. 2, 2019
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