Optical Instruments, Volume. 44, Issue 1, 15(2022)

Contrastive measurement of off-axis paraboloids

Wei CHEN... Qing WANG* and Guibo ZHU |Show fewer author(s)
Author Affiliations
  • School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, Nanjing 210094, China
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    Figures & Tables(11)
    Diagram of off-axis paraboloid misalignment
    Exit pupil transformation diagram
    Optical path simulation
    Influence of adjustment error on aberration
    Actual measurements of stigmatic null test
    Variation diagram of rough adjustment process
    Software acquisition results of dynamic interferometer
    Luphoscan measurement of off-axis paraboloids
    Measurement results read by MATLAB
    • Table 1. Zernike coefficient of measured results

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      Table 1. Zernike coefficient of measured results

      AberrationMag.waves
      Tilt0.017
      Focus0.013
      Astig0.024
      Coma Spherical 0.035 -0.01
    • Table 2. Comparison of Luphoscan and dynamic interferometer measurements

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      Table 2. Comparison of Luphoscan and dynamic interferometer measurements

      测量方式 测量过程像差判断Luphoscan测量结果初步消像散与
      动态干涉仪基于零位干涉原理,调节抛物面,使干涉图接近零条纹,解包获得面形。无明显像差,但离轴量误差被视为调整误差调整掉了。
      Luphoscan基于多波长干涉测距原理,通过匹配抛物面小区域实际与理论sag值来确定离轴抛物面的偏心与倾斜,然后按离轴抛物面理论方程规划扫描路径,扫描过程始终垂直于待测面,计算实际与理论值偏差作为测量结果。存在明显像散项
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    Wei CHEN, Qing WANG, Guibo ZHU. Contrastive measurement of off-axis paraboloids[J]. Optical Instruments, 2022, 44(1): 15

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    Paper Information

    Category: TESTING TECHNOLOGY

    Received: Nov. 22, 2021

    Accepted: Jan. 10, 2022

    Published Online: Mar. 22, 2022

    The Author Email: WANG Qing (wangqing@njust.edu.cn)

    DOI:10.3969/j.issn.1005-5630.2022.01.003

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