Optical Instruments, Volume. 44, Issue 1, 15(2022)

Contrastive measurement of off-axis paraboloids

Wei CHEN, Qing WANG*, and Guibo ZHU
Author Affiliations
  • School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, Nanjing 210094, China
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    An off-axis paraboloid with an off-axis angle of 45° and a diameter of 1 inch was used as the sample to compare the difference between the traditional null interferometric measurement results and the non-contact 3D aspheric optical surface shape measurement system Luphoscan. Zemax was used to simulate the influence of the adjustment errors of the six dimensions of the off-axis paraboloid on the measurement results. The expression of off-axis error in the two completely different measurement processes was analyzed, which solved the problem of the availability of Luphoscan measurement results. According to the simulation results, the null test interference optical path structure based on the dynamic interferometer was set up, and the six-dimensional adjustment standard process of the off-axis paraboloid was established, which could quickly eliminate the adjustment error and off-axis quantity error, and the repeatability test results reach the accuracy of pv=0.135λ.

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    Wei CHEN, Qing WANG, Guibo ZHU. Contrastive measurement of off-axis paraboloids[J]. Optical Instruments, 2022, 44(1): 15

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    Paper Information

    Category: TESTING TECHNOLOGY

    Received: Nov. 22, 2021

    Accepted: Jan. 10, 2022

    Published Online: Mar. 22, 2022

    The Author Email: WANG Qing (wangqing@njust.edu.cn)

    DOI:10.3969/j.issn.1005-5630.2022.01.003

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