Fig. 1. Structural design of X-ray zone plate. (a) Structure diagram of zone plate; (b) variation of diffraction efficiency of Al₂O₃/HfO₂ zone plate with thickness at 1.2 keV

Fig. 2. Process roadmap for preparing X-ray multilayer zone plates

Fig. 3. Ellipsometer test results of Al₂O₃ and HfO₂ film thickness

Fig. 4. Rate correction result diagram. (a) SEM images of multilayer films on Si slices; (b) the comparison curve between theoretical and measured film thickness

Fig. 5. SEM images of FIB slicing process and prepared zone plate. (a) Cutting; (b) extraction; (c) transfer and fixation; (d) top view; (e) sectional view; (f) partial enlarged view

Fig. 6. Partial enlarged SEM images of defects in multilayer zone plates. (a) Crack through the whole zone part; (b) interfacial crack between multilayers and substrate; (c) crack in the outer zones

Fig. 7. Imaging testing of X-ray zone plates. (a) Schematic diagram of test optical path; (b) SEM of gold plated star type standard target samples; (c) standard target center inner ring SEM enlarged view; (d) an optical microscope image of a zone plate fixed to a test optical path bracket; (e)(f) focused imaging of a star type standard target sample using a zone plate