Laser & Optoelectronics Progress, Volume. 52, Issue 3, 31403(2015)
Fabrication Process Study of Silicon Nitride Passivation Layer on GaAs Substrate at Low Temperature
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Wu Tao, Jiang Xianfeng. Fabrication Process Study of Silicon Nitride Passivation Layer on GaAs Substrate at Low Temperature[J]. Laser & Optoelectronics Progress, 2015, 52(3): 31403
Paper Information
Category: Lasers and Laser Optics
Received: Sep. 9, 2014
Accepted: --
Published Online: Feb. 5, 2015
The Author Email: Tao Wu (wut@sibet.ac.cn)
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