Fig. 1. Schematic diagram of picosecond laser processing system

Fig. 2. Schematic diagram of electrochemical polishing system

Fig. 3. Inlet and outlet morphology of micro-hole under different laser processing paths

Fig. 4. Inlet and outlet diameters of micro-hole under different laser processing paths

Fig. 5. Inlet morphology and diameter of the micro-hole under different laser power rates

Fig. 6. Inlet morphology and diameter of the micro-hole under different laser cutting speeds

Fig. 7. Outlet morphology and diameter of the micro-hole under different laser defocusing amounts

Fig. 8. Schematic diagram of electrochemical polishing principle

Fig. 9. Electrochemical polishing effect of workpiece surface under different processing voltages

Fig. 10. Two-dimensional diagram of the array micro-holes of safety filter

Fig. 11. Array micro-holes of safety filter after laser machining

Fig. 12. Array micro-holes of safety filter after electrochemical polishing machining