Optics and Precision Engineering, Volume. 31, Issue 12, 1774(2023)

Laser-electrochemical combined machining for micro-hole arrays of safety filter

Shenghong GE1...2, Jiwen SHEN1 and Yongbin ZENG1,* |Show fewer author(s)
Author Affiliations
  • 1College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing2006,China
  • 2AVIC Nanjing Servo Control System Co., Ltd.Nanjing10016,China
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    Highly effective and adaptable fabrication of high-quality micro-hole arrays for safety filters remains challenging. Therefore, in this study, a combination of laser and electrochemical machining technology was developed for preparing micro-hole arrays for safety filters. An experimental processing system for laser–electrochemical combined machining was devised, the effects of process parameters on the processing quality were investigated, and a safety filter sample was prepared. The results indicated that in the laser processing, the laser cutting path significantly affects the outer shape of the through-hole, and the outer roundness of the through-hole can be significantly improved using the optimized concentric circle path (outer diameter: 270 μm, inner diameter: 230 μm, and spacing distance: 5 μm). A higher laser power and lower cutting speed correspond to a larger through-hole diameter and heat-affected zone. NaNO3-ethylene glycol solution as polishing electrolyte can form a diffusion layer on the machining surface for electrolytic polishing and remove the spatters and burrs generated by laser processing. Using the optimized process parameters, 253 micro-hole structures with a diameter of 0.31 mm were machined, and the variance of the inlet and outlet diameters was only 2.02 and 1.71, respectively, indicating a high dimensional consistency. The laser-electrochemical combined process has considerable potential for the fabrication of high-quality micro-hole arrays on thin-walled workpieces.

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    Shenghong GE, Jiwen SHEN, Yongbin ZENG. Laser-electrochemical combined machining for micro-hole arrays of safety filter[J]. Optics and Precision Engineering, 2023, 31(12): 1774

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Dec. 24, 2022

    Accepted: --

    Published Online: Jul. 25, 2023

    The Author Email: ZENG Yongbin (binyz@nuaa.edu.cn)

    DOI:10.37188/OPE.20233112.1774

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