Optics and Precision Engineering, Volume. 28, Issue 2, 372(2020)
Effect of lapping load on self-conditioning performance of fixed agglomerated abrasive pad
[1] [1] ZHU Y W, WANG J, LI J, et al.. Research on the polishing of silicon wafer by fixed abrasive pad[J]. China Mechanical Engineering, 2009, 20(6): 723-727, 732.(in Chinese)
[2] [2] KIM H, PARK B, LEE S, et al.. Self-conditioning fixed abrasive pad in CMP[J]. Journal of the Electrochemical Society, 2004, 151(12): G858-G862.
[3] [3] VAN DER VELDEN P. Chemical mechanical polishing with fixed abrasives using different subpads to optimize wafer uniformity[J]. Microelectronic Engineering, 1999, 50(1): 41-46.
[4] [4] ZHU N N, ZHU Y W, JUNX, et al.. Modeling and validation of indentation depth of abrasive grain into lithium niobate wafer by fixed-abrasive lapping[J]. Transactions of Nanjing University of Aeronautics and Astronautics, 2018, 34(1): 97-104.
[5] [5] LIN K, ZHU Y W, LI J, et al.. Study on lapping of K9 glass by fixed abrasive pad[J]. Bulletin of the Chinese Ceramic Society, 2010, 29(1): 6-11.(in Chinese)
[7] [7] CHOI J Y, JEONG H D. A study on polishing of molds using hydrophilic fixed abrasive pad[J]. International Journal of Machine Tools & Manufacture, 2004, 44(11): 1163-1169.
[8] [8] KIM H Y, KIM H, JEONG H, et al.. Self-conditioning of encapsulated abrasive pad in chemical mechanical polishing[J]. Journal of Materials Processing Technology, 2003, 142(3): 614-618.
[9] [9] XU J, ZHU Y W, ZHU N N, et al.. Self-conditioning mechanism of hydrophilic fixed abrasive pad[J]. Nanotechnology and Precision Engineering, 2014, 12(6): 429-434.(in Chinese)
[11] [11] LI J, HUANG J D, XIA L, et al.. Effect of chemical additive on fixed abrasive pad self-conditioning in CMP[J].The International Journal of Advanced Manufacturing Technology, 2017, 88: 107-113.
[12] [12] LI J, TANG Y K, HUA C X, et al.. Effect of process parameters on fixed abrasive pad self-conditioning in micro/nano machining[J]. Integrated Ferroelectrics, 2017, 182(1): 53-64.
[13] [13] SUNARTO, ICHIDAY. Creep feed profile grinding of Ni-based superalloys with ultrafine-polycrystalline cBN abrasive grits[J]. Precision Engineering, 2001, 25(4): 274-283.
[14] [14] ZHU Y J, DING W F, RAO Z W, et al.. Micro-fracture mechanism of polycrystalline CBN grain during single grain scratching tests based on fractal dimension analysis[J]. Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology, 2019, 59: 26-36.
[15] [15] HUANG X, DING W F, ZHU Y J, et al.. Influence of microstructure and grinding load on the bulk toughness and fracture behavior of PCBN abrasive grains[J]. The International Journal of Advanced Manufacturing Technology, 2018, 94(9/10/11/12): 4519-4530.
[16] [16] WANG J SH, ZHU Y W, XUSH, et al.. Optimization of nickel coating on diamond abrasive particle at different lapping stages[J]. Journal of Synthetic Crystals, 2015, 44(1): 13-18.(in Chinese)
[17] [17] XU SH, ZHU Y W, WANG J SH, et al.. Effect of diamond coating rate on sapphire lapping performance by fixed abrasive pad[J]. Journal of the Chinese Ceramic Society, 2015, 43(4): 445-450.(in Chinese)
[18] [18] ZHU Y W, SHEN Q, WANG Z K, et al.. Lapping performance on quartz glass of fixed abrasive pad embedded with multi-grain diamond grits[J]. Infrared and Laser Engineering, 2016, 45(10): 26-31.(in Chinese)
[19] [19] WANG J B. Material RemovalMechanism and Process Research of Lapping Sapphire by Fixed Abrasive[D]. Nanjing: Nanjing University of Aeronautics and Astronautics, 2015.(in Chinese)
Get Citation
Copy Citation Text
NIU Feng-li, ZHU Yong-wei, SHEN Gong-ming, WANG Zi-kun, WANG Ke-rong. Effect of lapping load on self-conditioning performance of fixed agglomerated abrasive pad[J]. Optics and Precision Engineering, 2020, 28(2): 372
Category:
Received: Aug. 8, 2019
Accepted: --
Published Online: May. 27, 2020
The Author Email: Feng-li NIU (niufengli123@163.com)