[1] [1] XU Ping, CHEN Wenjing, SU Xianyu. Higher-precision FTP based on digital light projecting ［J］. Opto-Electronic Engineering, 2005, 32(11): 59-62.

[2] [2] CREATH K. V phase-measurement interferometry techniques［J］. Progress in Optics, 1988, 26(6): 349-393.

[3] [3] KANG X, HE X. Two step phase shifting technique for phase measurement profilometry by grating projection［J］. Acta Optica Sinica, 2015, 23(1): 75-79.

[4] [4] SHAO Shuangyun, SU Xianyu. New depth recovery algorithm in modulation measurement profilometry ［J］. Opto-Electronic Engineering, 2005, 32(9): 43-54.

[5] [5] VARGAS J, KONINCKX T P, QUIROGA J A, et al. Three-dimensional measurement of microchips using structured light techniques［J］. Optical Engineering, 2008, 47(5): 53-62.

[6] [6] ANAND A, FARIDIAN A, CHHANIWAL V, et al. High-resolution quantitative phase microscopic imaging in deep UV with phase retrieval［J］. Optics Letters, 2011, 36(22): 4362-4364.

[7] [7] LI A, PENG X, YIN Y, et al. Fringe projection based quantitative 3D microscopy［J］. Optik, 2013, 124(21): 5052-5056.

[8] [8] VAN JEUGHT S, SOONS J A M, DIRCKX J J J. Real-time microscopic phase-shifting profilometry［J］. Applied Optics, 2015, 54(15): 4953-4959.

[9] [9] YU Yanqin. Research on 3-D small field of view measurement system based on fringe projection ［D］. Tianjin: Hebei University of Technology, 2015: 6-12.

[10] [10] AI Jia, LIU Shouqi, LIU Yuankun, et al. Three-dimensional small-field measurement system based on tri-frequency heterodyne fringe analysis ［J］. Opto-Electronic Engineering, 2016, 43(09): 39-44.

[11] [11] HU Y, CHEN Q, TAO T, et al. Absolute three-dimensional micro surface profile measurement based on a greenough-type stereomicroscope［J］. Measurement Science and Technology, 2017, 28(4): 045004.

[12] [12] KONG Weiqi. Research on micro-obeject fringe projector profilometry system［D］. Nanjing: Southeast University, 2018: 7-13.

[13] [13] LI B, ZHANG S. Microscopic structured light 3D profilometry: binary defocusing technique vs. sinusoidal fringe projection［J］. Optics and Lasers in Engineering, 2017, 96: 117-123.

[14] [14] WANG Yonghong, CHEN Weijie, ZHONG Shimin, et al. Research progress in phase Unwrapping technology and its applications ［J］. Measurement & Control Technology, 2018, 37(12): 1-7.

[15] [15] SCHREIER H W, GARCIA D, SUTTON M A. Advances in light microscope stereo vision［J］. Experimental Mechanics, 2017, 44(3): 278-288.