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Journal of Atmospheric and Environmental Optics, Volume. 3, Issue 5, 331(2008)

Correction Capability Analysis of the Segmented Micro Deformable Mirror Based on MEMS

Li-zi CHEN1,*... Xiao-wei GUAN1, and Bao-guo WANG1,23 |Show fewer author(s)
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  • 1[in Chinese]
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  • 3[in Chinese]
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    CHEN Li-zi, GUAN Xiao-wei, WANG Bao-guo. Correction Capability Analysis of the Segmented Micro Deformable Mirror Based on MEMS[J]. Journal of Atmospheric and Environmental Optics, 2008, 3(5): 331

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    Paper Information

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    Received: May. 8, 2008

    Accepted: --

    Published Online: May. 21, 2010

    The Author Email: Li-zi CHEN (lzchen1234@yahoo.com.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology