Optics and Precision Engineering, Volume. 14, Issue 3, 406(2006)

Design and analysis on a 2-DOF nanopositioning stage

[in Chinese]... [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    References(8)

    [1] [1] ZHANG D,CHANG C,ONO T,et al.A piezodriven XY-microstage for multiprobe nanorecording[J].Sensors and Actuators,2003,108(1-3):230-233.

    [2] [2] YANG R,JOUANEH M,SCHWEIZER R.Design and characterization of a low-profile micropositioning stage[J].Precision Engineering,1996,18(1):20-29.

    [3] [3] XU W,KING T.Flexure hinges for piezoactuator displacement amplifiers flexibility,accuracy,and stress consideration[J].Precision Engineering,1996,19(1):4-10.

    [5] [5] PAROS J M,WEISBORD L.How to design flexure hinges[J].Machine Design,1965:151-157.

    [6] [6] JOUANEH M,YANG R Y.Modeling of flexure-hinge type lever mechanisms[J].Precision Engineering,2003,27(4):407-418.

    [7] [7] WU Y,ZHOU.An XYθ mechanism actuated by one actuator[J].Mechanism and Machine Theory,2004,39 (10):1 101-1 110.

    [9] [9] ELMUSTAFA A A,LAGALLY M G.Flexural-hinge guided motion nanopositioner stage for precision machining:finite element simulations[J].Precision Engineering,2001,25(1):77-81.

    [10] [10] ZETTL B,SZYSZKOWSKI W,ZHANG W J.Accurate low DOF modeling of a planar compliant mechanism with flexure hinges:the equivalent beam methodology[J].Precision Engineering,2005,29:237-245.

    CLP Journals

    [1] CHEN Gui-min, HAN Qi. Deep-notch elliptical flexure hinges[J]. Optics and Precision Engineering, 2009, 17(3): 570

    [2] PENG Hai-feng, SUN Zhen. Design and Analysis of a Precision Axial Adjusting Mechanism for Optical Elements in Lithographic Lens[J]. Acta Photonica Sinica, 2014, 43(4): 422005

    [3] CHENG Fang, FEI Ye-tai. Trigger control of touch probe for nano-CMM[J]. Optics and Precision Engineering, 2010, 18(12): 2603

    [4] ZHOU Jing-tao, HE Zhong-bo, BAI Guo, LIU Guo-ping. Modeling and experiment of static and dynamic characteristics of inchwormgiant magnetostrictive rotary actuator[J]. Optics and Precision Engineering, 2019, 27(10): 2215

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and analysis on a 2-DOF nanopositioning stage[J]. Optics and Precision Engineering, 2006, 14(3): 406

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jul. 13, 2005

    Accepted: --

    Published Online: Feb. 18, 2008

    The Author Email:

    DOI:

    Topics