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Optics and Precision Engineering, Volume. 14, Issue 3, 406(2006)

Design and analysis on a 2-DOF nanopositioning stage

[in Chinese]... [in Chinese], [in Chinese] and [in Chinese] |Show fewer author(s)
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and analysis on a 2-DOF nanopositioning stage[J]. Optics and Precision Engineering, 2006, 14(3): 406

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    Received: Jul. 13, 2005

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology