Optics and Precision Engineering, Volume. 15, Issue 9, 1371(2007)
Dynamic characteristic of NEM switch based on molecular dynamic simulation
References(2)
[10] [10] YASUMURA K Y,STOWE T D,CHOW E M,et al..Quality factors in micro and submicron-thick cantilevers[J].Journal of Micro electromechanical Sytems,2000,9(1):117-125.
[11] [11] DEQUESNES M,TANG ZH,ALURU N R.Static and dynamic analysis of carbon nanotube-based switches[J].Journal of Engineering Materials and Technology,2004,126:230-237.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Dynamic characteristic of NEM switch based on molecular dynamic simulation[J]. Optics and Precision Engineering, 2007, 15(9): 1371
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