Spectroscopy and Spectral Analysis, Volume. 40, Issue 8, 2647(2020)
Study on Metal Grating Structure for Improving Spectral Absorptivity of Infrared Microbolometer
[1] [1] Safaei A, Modak S, Lee J, et. al. Opt. Express, 2018, 26(25): 32931.
[2] [2] Shen N, Yu J, Tang Z. IEEE Photon Technol. Lett., 2015, 27(12): 1247.
[3] [3] Wu Z Y, Tang S F, Zeng H Y, et al. Microelectron Reliab, 2018, 91: 313.
[4] [4] Vadnala S, Paul N, Agrawal A, et al. Mat. Sci. Semicon. Proc., 2018, 81: 82.
[5] [5] Bernardi M, Mustafa, Neaton J B, et al. Nat. Commun., 2015, 6: 7044.
[6] [6] Zayats A V, Smolyaninov I I. J. Optics-UK, 2003, 5(4): S16.
[7] [7] Melikyan A, Lindenmann N, Walheim S, et al. Opt. Express, 2011, 19(9): 8855.
[8] [8] Lim S H, Mar W, Matheu P, et al. J. Appl. Phys., 2007, 101(10): 104309.
[9] [9] Yokogawa S, Burgos S P, Atwater H A. Nano. Lett., 2012, 12(8): 4349.
[10] [10] Han Z, Bozhevolnyi S I. Rep. Prog. Phys., 2012, 76(1): 016402.
[11] [11] Akbari A, Tait R N, Berini P. Opt. Express, 2010, 18(8): 8505.
[12] [12] Liu N, Mesch M, Weiss T, et al. Nano. Lett., 2010, 10(7): 2342.
[13] [13] Stanley R. Nat. Photonics, 2012, 6(7): 409.
[14] [14] Ordal M A, Long L L, Bell R J, et al. Appl. Optics, 1983, 22: 1099.
[15] [15] Verleur H W, Barker J A S, Berglund C N. APS Journals, 1968, 172: 788
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ZHANG Yu-feng, WANG Yang, WU Yuan-qing, DAI Jing-min. Study on Metal Grating Structure for Improving Spectral Absorptivity of Infrared Microbolometer[J]. Spectroscopy and Spectral Analysis, 2020, 40(8): 2647
Received: Jul. 4, 2019
Accepted: --
Published Online: Aug. 12, 2020
The Author Email: Yu-feng ZHANG (zyf81@aliyun.com)