[1] [1] WANG L, ZHANG W, ZHANG Z P, et al. Spinning frequency estimation algorithm of MEMS gyro's output signal based on FFT coefficient［J］.Microsystem Technologies, 2018, 24(4):1789-1793.

[2] [2] KOURANI A, HEGAZI E, ISMAIL Y. Electronic frequency compensation of AlN-on-Si MEMS reference oscillators［J］. Microelectronics Journal, 2016, 54:72-84.

[3] [3] WU X Z, LIU Z L, LI S Y. Influence factors and enhance-ment on property of micro-silicon gyroscopes［J］. Micronanoelectronic Technology, 2003, 7(8):274-277.

[4] [4] WU X Z, LIU Z L,LI S Y. Influence factors and enhance-ment on property of micro-silicon gyroscopes［J］. Micronanoelectronic Technology, 2003, 7(8): 274-277.

[5] [5] KUMAR P.Multilevel communication optimal least squares［C］//International Conference on Computational Science, Reykjavik, Iceland, 2015: 1838-1847.

[7] [7] VAPNIK V N. The nature of statistical learning theory［M］. New York:Springer, 1999.

[9] [9] FRIEDRICHS F. Evolutionary tuning of multiple SVM parameters［J］. Neurocomputing, 2017, 64(2):107-117.

[11] [11] XAVIER A L, Jr, CELASCHI S. Groundwater monitoring of a hidric shortage crisis in Brazil based on LS-SVM forecasts for the city of S, o Paulo［J］.International Journal of Scientific & Engineering Research, 2017, 8(1): 1-9.