Acta Photonica Sinica, Volume. 33, Issue 9, 1140(2004)

Fabrication and Characterization of Sol-Gel Silica Waveguides

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    References(12)

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    [2] [2] Grand G,Jadot J P.Low-loss PECVD silica channel waveguides for optical communications.Elect Lett,1990,26(25):2135~2137

    [3] [3] Kawachi M.Silica waveguides on silicon and their application to integrated-optic components.Opt Quantum Elect,1990,22(5):391~416

    [5] [5] Imoto N,Shimiau N.Sputtered silica waveguides with an embedded three-dimensional structure.J Lightwave Techmol,1983,1(1):289~293

    [6] [6] Holmes A S,Syms R R A.Fabrication of buried channel waveguides on silicon substrates using spin-on glass.Appl Opt,1993,32(25):4916~4921

    [7] [7] Paul Coudray,Chisham J.Ultraviolet light imprinted sol-gel silica glass low-loss waveguides for use at 1.55 μm.Opt Eng,1997,36(4):1234~1240

    [8] [8] Touam T,Milova G.Organoaluminophosphate sol-gel silica glass thim films for integrated.Thin Solid Films,1997,307:203~207

    [9] [9] Iraj Najafi,Mark P.UV-light imprinted surface, ridge and buried sol-gel glass waveguides and devices on silicon.SPIE,1996,2954:100~104

    [10] [10] Du X M,Tahar Touam.Sol-gel waveguide fabrication parameters:an experimental investigation.Opt Eng,1998,37(4):1101~1104

    [13] [13] Najafi S.Introduction to Glass Integrated Optics.Artech House,Boston,1992

    [14] [14] Herbert K,Norbert M,Helmut S.Fine patterning of thin sol-gel films.J Non-Crystalline Solid,1992,147-148: 447~450

    [15] [15] Lin Y.Fabrication and characterization of low-loss, sol-gel planar waveguides.Anal Chem,1994,66(8): 1254~1263

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication and Characterization of Sol-Gel Silica Waveguides[J]. Acta Photonica Sinica, 2004, 33(9): 1140

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    Paper Information

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    Received: Aug. 18, 2003

    Accepted: --

    Published Online: Sep. 17, 2007

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