Acta Photonica Sinica, Volume. 32, Issue 8, 969(2003)

Spatial Phase-shifting Method for Adaptive Vibration-resistant Interferometer

[in Chinese]1...2, [in Chinese]2, [in Chinese]2, [in Chinese]2 and [in Chinese]2 |Show fewer author(s)
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    References(4)

    [1] [1] Wyant J C. Interferometric optical metrology: basic system and principles.Laser Focus, 1982,18: 65~71

    [2] [2] Schwider J, Falkenstorfer O, Schreiber H, et al. New compensating four-phase algorithm for phase-shift interferometry. Opt Eng,1993,32(8): 1883~1885

    [3] [3] Schmit J, Creath K. Extended averaging technique for derivation of error- compensating algorithms in phase-shifting interferometry.Appl Opt, 1995,34P(19):3610~3619

    [4] [4] Yamaguchi I, Liu J, Kato J. Active phase-shifting interferometers for shape and deformation measurements.Opt Eng, 1996,35(10): 2930~2937

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Spatial Phase-shifting Method for Adaptive Vibration-resistant Interferometer[J]. Acta Photonica Sinica, 2003, 32(8): 969

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    Paper Information

    Category: Physical Optics

    Received: Sep. 24, 2002

    Accepted: --

    Published Online: Sep. 18, 2007

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