Infrared and Laser Engineering, Volume. 30, Issue 5, 382(2001)
Effect of technologic parameters on particle diameters of nano-Si produced by LICVD
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effect of technologic parameters on particle diameters of nano-Si produced by LICVD[J]. Infrared and Laser Engineering, 2001, 30(5): 382