Fig. 1. Schematic diagram of laser scanning system

Fig. 2. Projection error

Fig. 3. Causes of corner deviation

Fig. 4. Projected patterning and drive signal

Fig. 5. Effect of scanning speed on laser opening and closing error

Fig. 6. Projected patterning with time-compensated

Fig. 7. Optimal compensation time for each scanning speed

Fig. 8. Influence of corner deviation on projected patterning

Fig. 9. Angle deviation at different angles

Fig. 10. Optimal compensation time at different angles

Fig. 11. Optimal compensation time for different angles

Fig. 12. Projected patterning and laser scanning projection system

Fig. 13. Actual projected patterning

Fig. 14. Comparison of average position deviation before and after compensation correction