Fig. 1. Measured number of pulses where damage occurred for each fixed laser fluence. (a) 10 and 600 Hz measurements with wafer (W) samples in air and vacuum (A/V). (b) 600 Hz measurements with two types of structures: grating bonded (G) and half grating un-bonded (H), each in air and vacuum. The solid curves represent an empirical fitting according to Equation (2).

Fig. 2. DTF’s quasi-intrinsic parameter as a function of logarithmic number of shots. DTF does not depend on the configuration (intrinsic) below a critical number of shots $n_{cr}$; but above this point the asymptotic DTF’s value depends on the configuration (extrinsic).