Preparation and Photoelectric Properties of Bi<sub>2</sub>Te<sub>3</sub> Infrared Transparent Conductive Films（Invited）

Table 1. Thickness of Bi₂Te₃ thin films prepared under different annealing conditions
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Table 1. Thickness of Bi₂Te₃ thin films prepared under different annealing conditions
Annealing condition As-deposited Annealed at 200 ℃ Annealed at 300 ℃ Annealed at 350 ℃
Film thickness/nm 16±0.1 15.5±0.1 14.6±0.1 14.3±0.1
Relative error 6.67% 3.33% -2.67% -4.67%

Table 2. Electrical properties of unannealed Bi₂Te₃ thin films with different thicknesses

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Table 2. Electrical properties of unannealed Bi₂Te₃ thin films with different thicknesses

Film thickness/nm	Sheet resistance/（×10³ Ω·□^-1）	Resistivity/（×10^-3 Ω·cm）	Carrier density/（×10²⁰ cm^-3）	Hall mobility/（×10^-1 cm²·V^-1·s^-1）
15	26.64	42.63	2.87	5.11
30	3.51	11.25	7.16	7.76
45	1.22	5.88	11.75	9.03

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Yihao WU, Xuehua XIAO, Ran BI, Yadan LI, Chuantao ZHENG, Yiding WANG. Preparation and Photoelectric Properties of Bi₂Te₃ Infrared Transparent Conductive Films（Invited）[J]. Acta Photonica Sinica, 2023, 52(10): 1052413

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Paper Information

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Received: Jul. 25, 2023

Accepted: Oct. 10, 2023

Published Online: Dec. 5, 2023

The Author Email: ZHENG Chuantao (zhengchuantao@jlu.edu.cn)

DOI:10.3788/gzxb20235210.1052413

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Thickness of Bi2Te3 thin films prepared under different annealing conditions

Table 1. Thickness of Bi2Te3 thin films prepared under different annealing conditions

Table 2. Electrical properties of unannealed Bi2Te3 thin films with different thicknesses

Table 2. Electrical properties of unannealed Bi2Te3 thin films with different thicknesses

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Table 1. Thickness of Bi₂Te₃ thin films prepared under different annealing conditions

Table 1. Thickness of Bi₂Te₃ thin films prepared under different annealing conditions

Table 2. Electrical properties of unannealed Bi₂Te₃ thin films with different thicknesses

Table 2. Electrical properties of unannealed Bi₂Te₃ thin films with different thicknesses