Piezoelectrics & Acoustooptics, Volume. 42, Issue 3, 317(2020)
Research on Precision Positioning Stage Based on Dual Piezoceramics Driving Principle
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HU Zhiping, GU Sen, TANG Feiyang, SUN Haonan, ZHU Junhui, WANG Yong, RU Changhai. Research on Precision Positioning Stage Based on Dual Piezoceramics Driving Principle[J]. Piezoelectrics & Acoustooptics, 2020, 42(3): 317
Received: Oct. 29, 2019
Accepted: --
Published Online: Apr. 21, 2022
The Author Email: Changhai RU (rchhai@gmail.com)