Piezoelectrics & Acoustooptics, Volume. 42, Issue 3, 317(2020)

Research on Precision Positioning Stage Based on Dual Piezoceramics Driving Principle

HU Zhiping1, GU Sen1, TANG Feiyang1, SUN Haonan1, ZHU Junhui2, WANG Yong2, and RU Changhai1,2,3、*
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    In order to solve the contradiction between the large motion range and the large scanning range of the precision positioning platform and realize the cross-scale nano positioning of the large motion range, a precision positioning platform based on the driving principle of dual piezoelectric ceramics was proposed in this study. The device combines the advantages of large motion range of the stick slip drive positioning platform, large scanning range of the piezoelectric scanner and high resolution. The platform consists of a base, a driving module, a flexible hinge mechanism and a guide rail. The driving module includes large and small piezoelectric ceramics, which drive the positioning platform in scanning mode and stepping mode respectively The experiment shows that the precision positioning platform has a maximum motion range of 21 mm, a maximum scanning range of 4.9 μm, a minimum resolution of 16 nm, and a maximum horizontal stepping motion speed of 10 mm/s, which meets the compatible requirements of large stroke and large scanning range.

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    HU Zhiping, GU Sen, TANG Feiyang, SUN Haonan, ZHU Junhui, WANG Yong, RU Changhai. Research on Precision Positioning Stage Based on Dual Piezoceramics Driving Principle[J]. Piezoelectrics & Acoustooptics, 2020, 42(3): 317

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    Paper Information

    Received: Oct. 29, 2019

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email: Changhai RU (rchhai@gmail.com)

    DOI:10.11977/j.issn.1004-2474.2020.03.008

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